A. High Temperature Furnaces 75
B. Wet Oxidation 79
C. Dry Oxidation 83
D. Boron Pre-Deposition 86
E. Phosphorus Pre-Deposition 91
F. Drive In Furnace 93
Drive-in Furnace Operating Procedure 100
G. Vacuum Systems and Evaporation 102
H. Four Point Probe 109
J. Wafer Cleaning 115
K. Plasma Ashing 117
L. Photolithography 121
M. Capacitance-Voltage Measurements 127
N. Junction Depth Measurements 132
O. Mask Aligners 134
P. Hydrofluoric Acid Etching 140
Q. Tektronix Curve Tracers 143
R. Ellipsometer / FilMetrics thickness gauge 157
S. Microscopes, Line Measurements 190