Micromachined Fabry-Perot Pressure Transducers
Youngmin Kim*, Jaeheon Han, and Dean P. Neikirk
The University of Texas at Austin
Department of Electrical and Computer Engineering
*current address: Texas Instruments
This work was sponsored by the Advanced Research Projects Agency (ARPA) Embedded Microsystems Program under contract # DABT63-92-C-0027 AMD P00002- DOD-ARPA.