Micromachined Fabry-Perot Pressure Transducers

Youngmin Kim*, Jaeheon Han, and Dean P. Neikirk

The University of Texas at Austin

Department of Electrical and Computer Engineering


e-mail: neikirk@uts.cc.utexas.edu

*current address: Texas Instruments

This work was sponsored by the Advanced Research Projects Agency (ARPA) Embedded Microsystems Program under contract # DABT63-92-C-0027 AMD P00002- DOD-ARPA.

Micromachined Fabry-Perot Pressure Transducers

Optically-interrogated pressure sensors

Fabry-Perot based displacement sensors

Conventional F-P sensor

Surface micromachined F-P device

Fabry-Perot cross section

Transmittance vs wavelength

Complete micromachined F-P device

F-P sensor pressure measurement

Which diaphragm should move?

Fabrication of top deflecting device

Top deflecting device

Deflection with applied pressure

Micromachined Fabry-Perot pressure sensors