Research in the Microelectromagnetic Device Group

For further information contact Professor Dean Neikirk at

For more information, please see our paper:

J. Han, D. P. Neikirk, M. Clevenger, and J. T. McDevitt, "Fabrication and characterization of a Fabry-Perot based chemical sensor," SPIE Microelectronic Structures and MEMS for Optical Processing II, M. E. Motamedi and W. Bailey, editors, Proc. SPIE 2881, Austin, Texas, USA, 14-15 October, 1996, pp. 171-178.

To see an enlarged version of any slide, just click on the slide of interest.