For more information, please see our paper:
J. Han, D. P. Neikirk, M. Clevenger, and J. T. McDevitt, "Fabrication and characterization of a Fabry-Perot
based chemical sensor," SPIE Microelectronic Structures and MEMS
for Optical Processing II, M. E. Motamedi and W. Bailey, editors, Proc.
SPIE 2881, Austin, Texas, USA, 14-15 October, 1996, pp. 171-178.