Micro-sensors - what happens when you make "classical" devices "small":

MEMS and bolometric IR sensors


posted: 6/17/98


The following are the slides used in my talk for the kick-off PI meeting for the new MURI program Biological Detection Systems for Electromagnetic Signatures, held on June 16, 1998 at The University of Texas at Austin. This work is sponsored through the AFOSR under grant no. F49620-98-1-0480.

A list of interesting web sites on IR bolometers and focal plane arrays.

Visit the Microelectromagnetic Devices group for other information on bolometers and related topics.

Click here to start

pdf version of of these slides (nicely printable; 170K file size)

Table of Contents

Micro-sensors - what happens when you make "classical" devices "small":

Where are the targets of opportunity for "small" machines?

What do you sense in a MEMS sensor?

Micro-Electromagnetic Device Group: Current Research in MEMS-related areas

MEMS example: Optically-interrogated pressure sensors

Surface micromachined Fabry-Perot cavity

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Spectral Range of Common Electromagnetic Detectors

Detector Size Relative to Wavelength

Single versus Multi- Mode Antennas

Optimum "Resistive" Loads: small detectors

Quasi-Optical Detection System

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Trade-offs: Small versus Large Thermal Detectors

Optimizing Responsivity: Thermal Impedance

Optimum "Resistive" Absorbers: large detectors

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Author: Dean Neikirk

Email: neikirk@mail.utexas.edu

Home Page: weewave.mer.utexas.edu