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We have done a variety of things using the epitaxial lift-off process, most applied to double barrier resonant tunneling diodes.

This is mainly the work of Alwin Tsao:

• A. J. Tsao, V. K. Reddy, and D. P. Neikirk, "Epitaxial Liftoff of AlAs/GaAs Double Barrier Resonant Tunneling Diodes," Electron. Lett., vol. 27, pp. 484-486, 1991.
• A. Tsao, "Molecular Beam Epitaxial Growth and Fabrication of Microwave and Photonic Devices for Hybrid Integration on Alternative Substrates," 1993, PhD, The University of Texas at Austin.

Here are a few images from his work: