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We have done a variety of things using the epitaxial lift-off process,
most applied to double barrier resonant tunneling
This is mainly the work of Alwin Tsao:
- A. J. Tsao, V. K. Reddy, and D. P. Neikirk, "Epitaxial Liftoff
of AlAs/GaAs Double Barrier Resonant Tunneling Diodes," Electron.
Lett., vol. 27, pp. 484-486, 1991.
- A. Tsao, "Molecular
Beam Epitaxial Growth and Fabrication of Microwave and Photonic Devices
for Hybrid Integration on Alternative Substrates," 1993, PhD,
The University of Texas at Austin.
Here are a few images from his work: