Links and resources for MEMS related information:

Please see the more up-to-date list of links kept for my class on mems.

Also see our "master list" of reference materials .

Return to the Microelectromagnetics Devices Group .

Refs list for chemical sensors .

• MEMS etch simulators:
  • Microsystems Web Page by GEMAC .
  • Caltech etch simulator .
    • for more info on this simulator look here .
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• random list from my bookmarks...
  • Georgia Tech .
  • GEMAC .
  • Hartwell, AVS 1997 .
  • Microfabricated DNA Analysis System .
  • Micromechanical Systems link .
  • The U.C. Berkeley Microfabrication Laboratory (Microlab) Home Page .
  • chem sensor beads .
  • CSMT Sensor Technology .
  • HTc bolometer .
  • NCSU MEMS Interconnect Project .
  • MCNC MEMS Home Page .
  • MEMS clearinghouse .
  • MEMS in Japan .
  • MEMS at Sandia National Laboratories .
  • Table of MEMS Switch Characteristics .