Where are the targets of opportunity for "small" machines?
actuation?
- what do you control?: fluid flow, object position
- motors?
- optical beam paths?
- work required only that necessary to move MEMS device itself (doesn’t have to do work on the “environment”!)
sensing?
- velocity, acceleration, temperature, pressure, distance are main "mechanical state variables"
- chemical/pathogen sensing
- mm-wave, sub-mm wave, FIR detection?
other application domains?
- optics (see above)? electronics (field emission devices, vacuum microelectronics)?