What do you sense in a MEMS sensor?
mechanical part of most MEM sensors produce displacement in response to the environmental stimulus
- how do you sense the mechanical movement?
- electrical: resistance, capacitance, inductance
- optical:
- interference, reflectance, transmittance
exceptions:
- "chemFETs," Hall effect and the like (but they are not really MEM devices)
- thermal device: bolometers (a radiation sensor)
- thermal device: hot wire anemometers, TC pressure gauges, flow gauges
- chemically-induced optical changes