Micro-Electromagnetic Device Group: Current Research in MEMS-related areas

• optical pressure sensors

  • design and fabrication

• inductive proximity sensors

  • design (sensor and sense/drive circuitry), fabrication, modeling

• microwave to infrared detectors

  • pit vipers and beetles

• chemical sensors

  • collaborative project with chemistry

• microwave/rf transmission line structures

  • impact of finite metal resistance, finite substrate conductivity (e.g., semiconducting substrates) on transmission line loss and dispersion

Previous slide

Next slide

Back to first slide

View graphic version