Index of Lecture Notes Files

You must be an enrolled student in this class to obtain a copy of these viewgraphs; some material contained on these viewgraphs may be used only on a "fair-use" educational basis. Password required for access to this material.

• NEW: I am now putting the Powerpoint files here directly (as well as the pdf versions below) as a Powerpoint show (.pps file). If you right-click the link and chose "save target as" you can download the file to your computer, then with Powerpoint already running, chose "open" for that file; you can then print several slides to the page (print the "notes" rather than the slides). If you do not have Powerpoint please let me know.  
  • index of lectures 2002 version.
  • safety 2002 version.
  • introduction 2002 version. (992K)
  • crystal sructure, dopants, impurities, defects 2002 version. (1,074K)
  • bulk crystal growth and wafer formation 2002 version. (997K)
  • oxidation 2002 version. (772K)
  • diffusion 2002 version. (1,046K)
  • implant 2002 version. (596K)
  • layer characterization 2002 version. (830K)
  • thin film deposition 2002 version. (568K).
  • epitaxy 2002 version. (355K)
  • metals 2002 version. (475K)
  • lithography old.
  • etch old.
• PDF copy of viewgraphs used in lecture.
  • introduction to IC fab and devices (pdf, 520K); 2002 version.
  • crystal structure, dopants, impurities, defects (pdf, 480K); 2002 version.
  • bulk crystal growth and wafer forming (pdf, 598K); 2002 version.
  • oxidation (pdf, 498K); 2002 version.
  • diffusion (pdf, 413K); 2002 version.
  • implant ; (pdf, 443K) 2002 version.
  • layer characterization ; (pdf, 517K), 2002 version.
  • thin film deposition (PVD and CVD; pdf, 522K); 2002 version.
  • epitaxy (includes only silicon; pdf, 304K); 2002 version.
  • metals ; (pdf, 494K) 2002 version.
  • lithography (pdf, about 450K); 1999 version.
  • etch ; 1999 version.
  • final lecture review slides; 1999 version.
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